Nanotechnology at Zyvex - nProber Features

By: Zyvex  09-12-2011
Keywords: Custom Software

The new Zyvex nProber™, part of the NanoWorks® Tools product line, is designed and optimized to electrically probe sub-100nm features on semiconductor devices.

The system consists of a state-of-the-art Zyvex Nanomanipulator, an FEI Quanta™ 200 FEG SEM, a Keithley 4200 parametric analyzer, an advanced anti-contamination system, and custom software to control and integrate each component.

The nProber dramatically increases throughput without sacrificing ease-of-use. The system guides the user through each application while remaining flexible enough for advanced probing experiments.

An easy-to-use Windows based software platform seamlessly integrates all of the components of the nProber. The FEI Quanta 200 provides the optimal resolution, video rates, beam shift, vacuum technology, and user control required for IC nanoprobing. The nProber’s electrical characterization system is specifically designed for low-noise measurements. Our most advanced anti-contamination system rigorously cleans the SEM enabling the user to achieve superior ohmic contact.

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Keywords: Custom Software

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