The new Zyvex nProber™, part of the NanoWorks®
Tools product line, is designed and optimized to electrically
probe sub-100nm features on semiconductor devices.
The system consists of a state-of-the-art Zyvex Nanomanipulator,
an FEI Quanta™ 200 FEG SEM, a Keithley 4200 parametric
analyzer, an advanced anti-contamination system, and custom
software to control and integrate each component.
The nProber dramatically increases throughput without sacrificing
ease-of-use. The system guides the user through each application
while remaining flexible enough for advanced probing experiments.
An easy-to-use Windows based software platform seamlessly
integrates all of the components of the nProber. The FEI Quanta
200 provides the optimal resolution, video rates, beam shift,
vacuum technology, and user control required for IC nanoprobing.
The nProber’s electrical characterization system is
specifically designed for low-noise measurements. Our most
advanced anti-contamination system rigorously cleans the SEM
enabling the user to achieve superior ohmic contact.
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