MEMS Microphone

By: Preciseley Microtechnology  09-12-2011
Keywords: Mems Microphone

Preciseley's mems microphone with floating sensing plate design significantly simplifies the microfabrication processes and eliminates the microfabrication challenges such as residual stresses, stiction etc. The unique sensing mechanism achieves higher sensitivity, smaller die size than the conventional parallel plate type of capacitive sensing MEMS microphone.

Die Size:

~ 1.0x1.0x0.5 mm



Frequency range:

50 Hz - 10 kHz

Sensitivity at 1kHz (0dB = 1V/Pa)

-40 dB (minimum)

Maximum input sound level:

115 dB

Dynamic range:

80 dB

Supply voltage:

1.5 - 5.0 V

Keywords: Mems Microphone

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